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Institute for Quantum Science and Technology

Publications by Y.-J. Shi

Refereed Journal Publications

20261 publication
  1. A. J. Fulton, S. Bag, L.-Q. Ly, V. Thangadurai and Y.-J. Shi, Nanostructured silicon on stainless steel as a binder-free and carbon-free anode for lithium-ion batteries, Canadian Journal of Chemistry, 16 January 2026. (accepted or in press).
20255 publications
  1. L.-Q. Ly, V. Surendran, V. Thangadurai and Y.-J. Shi, Influence of silicon nanowire morphology and defect on its lithium-ion battery anode performance, Journal of Physical Chemistry C 129(35): 15527 - 15540, 19 August 2025.
  2. S. Ghebretnsae, T. J. Ziehl, S. Purdy, P. Zhang, T.-K. Sham and Y.-J. Shi, Pulsed laser-induced dewetting for the production of noble-metal high-entropy-alloy nanoparticles, Nanoscale 17(25): 15423 - 15435, 9 June 2025.
  3. M.-J. Xu, Z.-N. Wang, R. Wang, Z.-H. Yu, Z.-H. Sun, B. Fu and Y.-J. Shi, Morphology features of β-Ga2O3 bulk crystals by EFG and CZ methods: A review, Progress in Crystal Growth and Characterization of Materials 71(1): 100658 (8 pp.), 1 April 2025.
  4. Z.-H. Yu, R. Wang, Z.-N. Wang, M.-J. Xu, T. Hou, B. Fu, D.-W. Gong and Y.-J. Shi, Effects of wet chemical etching on surface band bending and electrical properties of Sn-doped β-Ga2O3 (101) substrate, Vacuum 233(11): 113959 (9 pp.), 1 March 2025.
  5. L.-Q. Ly, S. N. Bonvicini and Y.-J. Shi, Platinum nanoparticle formation by pulsed laser-induced dewetting and its application as catalyst in silicon nanowire growth, Journal of Physical Chemistry C 129(9): 4553 - 4564, 23 February 2025.
20241 publication
  1. L.-Q. Ly, C. Cordoba, A. Blackburn and Y.-J. Shi, Platinum-catalyzed silicon nanowire growth─Evidence for a switch from vapor–liquid–solid to vapor–solid–solid mechanism with platinum nanoparticle size, Journal of Materials Chemistry C 128(35): 14811 - 14823, 24 August 2024.
20235 publications
  1. L.-Q. Ly, S. Burns, C. Cordoba, M. Dolgos, A. Blackburn and Y.-J. Shi, Fabrication of platinum nanoparticles with different morphologies by thermal dewetting in the presence of residual oxygen and their optical properties, Journal of Physical Chemistry C 127(50): 24417 - 24431, 8 December 2023.
  2. J. M. Stevenson, E. Ampong and Y.-J. Shi, Understanding the reaction chemistry of 1,1,3,3-Tetramethyldisilazane as a precursor gas in a catalytic chemical vapor deposition process, Journal of Physical Chemistry A 127(44): 9185 - 9195, 26 October 2023.
  3. A. J. Fulton and Y.-J. Shi, Arrayed and entangled silicon nanowires using Au nanoparticle catalysts prepared by pulsed laser-induced dewetting, Canadian Journal of Chemistry 102(1): 17 - 26, 18 September 2023.
  4. B. Fu, Z. Yu, H. Wang, Q. Wang, S. Gao, Y. Qu, X. Zhang and Y.-J. Shi, Anisotropies of structure, optical properties, contact, and epitaxy on (101)- and (001)-oriented β-Ga2O3 crystal planes, ACS Applied Optical Materials 1(9): 1566 - 1574, 29 August 2023.
  5. S. N. Bonvicini, A. Hoang, V. I. Birss, S.K. Purdy, R. Sammynaiken, T.-K. Sham and Y.-J. Shi, Pt-Rich core/Au-rich shell nanoparticle formation using pulsed laser-induced dewetting and their electrochemical characteristics, Journal of Physical Chemistry C 127(28): 13945 - 13957, 6 July 2023.
20224 publications
  1. A. Yadav, J. Stevenson, E. Ampong and Y.-J. Shi, Theoretical study on the decomposition kinetics and thermochemistry of tetramethyldisilazane and hexamethyldisilazane - formation of silanimine and silene species, Journal of Physical Chemistry A 126(44): 8156 - 8172, 31 October 2022.
  2. S. N. Bonvicini and Y.-J. Shi, Formation and removal of alloyed bimetallic Au-Ag nanoparticles from silicon substrates for tunable surface plasmon resonance, ACS Applied Nano Materials 5(10): 14850 - 14861, 21 September 2022.
  3. A. Yadav, B. Fu, S. N. Bonvicini, L.-Q. Ly, Z.-T. Jia and Y.-J. Shi, β-Ga2O3 nanostructures: Chemical vapor deposition growth using thermally dewetted Au nanoparticles as catalyst and characterization, Nanomaterials 12(15): 2589 (15 pp.), 28 July 2022.
  4. S. N. Bonvicini, B. Fu, A. J. Fulton, Z.-T. Jia and Y.-J. Shi, Formation of Au, Pt, and bimetallic Au-Pt nanostructures from thermal dewetting of single-layer or bilayer thin films, Nanotechnology 33(23): 235604 (14 pp.), 17 March 2022.
20217 publications
  1. B. Fu, G.-Z. Jian, W.-X. Mu, Y. Li, H.-Y. Wang, Z.-T. Jia, Y.-B. Li, S.-B. Long, Y.-J. Shi and X.-T. Tao, Crystal growth and design of Sn-doped β-Ga2O3: Morphology, defect and property studies of cylindrical crystal by EFG, Journal of Alloys and Compounds 896(16): 162830 (9 pp.), 24 November 2021.
  2. B. Fu, W.-X. Mu, Y. Li, Y.-J. Shi, Y.-B. Li, Z.-T. Jia and X.-T. Tao, Investigation of the blue color center in β-Ga2O3 crystals by the EFG method, CrystEngComm 23: 8360 - 8366, 21 October 2021.
  3. J. M. Stevenson and Y.-J. Shi, Theoretical study of decomposition kinetics and thermochemistry of bis(dimethylamino)silane—formation of methyleneimine and silanimine species, Journal of Physical Chemistry A 125(57): 8175 - 8186, 13 September 2021.
  4. B. Fu, G.-Z. Jian, G.-H. He, B.-Y. Feng, W.-X. Mu, Y. Li, Z.-T. Jia, Y.-B. Li, S.-B. Long, S.-N. Ding, Y.-J. Shi and X.-T. Tao, Investigation on β-Ga2O3 (101) plane with high-density surface dangling bonds, Journal of Alloys and Compounds 889(16): 161714 (9 pp.), 26 August 2021.
  5. L.-Q. Ly, A. J. Fulton, S. N. Bonvicini and Y.-J. Shi, Pulsed laser-induced dewetting and thermal dewetting of Ag thin films for the fabrication of Ag nanoparticles, Nanotechnology 32(33): 335301 (14 pp.), 24 May 2021.
  6. B. Fu, G.-H. He, W.-X. Mu, Y. Li, B.-Y. Feng, K.-H. Zhang, H.-Y. Wang, S.-J. Zhang, Z.-T. Jia, Y.-J. Shi, Y.-B. Li, S.-N. Ding and X.-T. Tao, Laser damage mechanism and in situ observation of stacking fault relaxation in a β-Ga2O3 single crystal by the EFG method, CrystEngComm 23: 3724 - 3730, 6 April 2021.
  7. C. A. Horwood, E. Owusu-Ansah, Y.-J. Shi and V. I. Birss, Pulsed laser induced dewetting of Au thin films on Ta2O5 substrates, Chemical Physics 541(11): 110926 (9 pp.), 15 January 2021.
20202 publications
  1. E. Owusu-Ansah, V. I. Birss and Y.-J. Shi, Mechanisms of pulsed laser-induced dewetting of thin platinum films on tantalum substratesA quantitative study, Journal of Physical Chemistry C 124(42): 23387 - 23393, 29 September 2020.
  2. A. J. Fulton, V. O. Kollath, K. Karan and Y.-J. Shi, Gold nanoparticle assembly on porous silicon by pulsed laser induced dewetting, Nanoscale Advances 2: 896 - 905, 31 January 2020.
20193 publications
  1. M. Rahmati, S. Dayneko, M. Pahlevani and Y.-J. Shi, Highly efficient quantum dot light‐emitting diodes by inserting multiple poly(methyl methacrylate) as electron‐blocking layers, Advanced Functional Materials 29(19): 1906742 (10 pp.), 21 October 2019.
  2. I. Badran, A. Rauk and Y.-J. Shi, New orbital symmetry-allowed route for cycloreversion of silacyclobutane and its methyl derivatives, Journal of Physical Chemistry A 123(9): 1749 - 1757, 8 February 2019.
  3. E. Owusu-Ansah, A. Rajendran and Y.-J. Shi, Catalytic dissociation of tris(dimethylamino)silane on hot tungsten and tantalum filament surfaces, Physical Chemistry Chemical Physics 21(26): 14357 - 14365, 22 January 2019.
20181 publication
  1. A. J. Fulton, V. O. Kollath, K. Karan and Y.-J. Shi, Macroporous silicon formation by electrochemical anodization of n-type silicon without illumination, Journal of Applied Physics 124(9): 095701 (9 pp.), 4 September 2018.
20174 publications
  1. I. Badran and Y.-J. Shi, A kinetic study of the gas-phase reactions of 1-methylsilacyclobutane in hot wire chemical vapor deposition, Physical Chemistry Chemical Physics 20(1): 75 - 85, 16 November 2017. (Back Cover Article).
  2. E. Owusu-Ansah, E. Cairns and Y.-J. Shi, Characterization of Si atomic transitions using pulsed electric discharge and resonance-enhanced multiphoton ionization techniques, Journal of Analytical Atomic Spectrometry 32(12): 2423 - 2432, 16 October 2017.
  3. Y.-J. Shi, I. Badran and S. Mulmi, Crystalline tantalum carbide and ditungsten carbide formation via hot wire chemical vapor deposition using the precursor of 1-methylsilacyclobutane, Surface and Coatings Technology 326: 103 - 110, 15 October 2017.
  4. Y.-J. Shi, Role of Free-radical Chain Reactions and Silylene Chemistry in UsiRole of free-radical chain reactions and silylene chemistry in using methyl-substituted silane molecules in hot-wire chemical vapor deposition, Thin Solid Films, 3 May 2017. (accepted or in press).
20162 publications
  1. E. Owusu-Ansah, Y. M. Wang and Y.-J. Shi, A theoretical study of the structures and electronic transitions of small silicon nitride clusters (SinNm, n + m ≤ 4), Journal of Molecular Spectroscopy 330: 200 - 210, 6 August 2016.
  2. Y.-J. Shi, L. Tong and S. Mulmi, Characterization of thin film deposits on tungsten filaments in catalytic chemical vapor deposition using 1,1-dimethylsilacyclobutane, Journal of Vacuum Science and Technology A 34(5): 051517 (7 pp.), 1 August 2016. (Featured Article and Cover Article).
20157 publications
  1. I. Badran and Y.-J. Shi, Structure changes in tungsten and tantalum wires in catalytic chemical vapor deposition using 1,3-disilacyclobutane, Journal of Physical Chemistry C 119(3): 19134 - 19142, 31 July 2015.
  2. R. Toukabri and Y.-J. Shi, Hydrogen elimination from the dissociation of methyl-substituted silanes on tungsten and tantalum surfaces, Canadian Journal of Chemistry 94(4): 265 - 272, 7 July 2015. (Calgary Special Issue).
  3. I. Badran and Y.-J. Shi, Gas-phase reaction kinetics of 1,3-disilacyclobutane in a hot-wire chemical vapor deposition reactor, Thin Solid Films 595: 239 - 243, 2 July 2015.
  4. E. Owusu-Ansah, C. A. Horwood, H. El-Sayed, V. I. Birss and Y.-J. Shi, A method for the formation of Pt metal nanoparticle arrays using nanosecond pulsed laser dewetting, Applied Physics Letters 106(20): 203103 (5 pp.), 18 May 2015.
  5. H. El-Sayed, C. A. Horwood, E. Owusu-Ansah, Y.-J. Shi and V. I. Birss, Gold nanoparticle array formation on dimpled Ta templates using pulsed laser-induced thin film dewetting, Physical Chemistry Chemical Physics 17(11): 11062 - 11069, 16 March 2015.
  6. Y.-J. Shi, Hot wire chemical vapor deposition chemistry in the gas phase and on the catalyst surface with organonsilicon compound, Accounts of Chemical Research 48(2): 163 - 173, 14 January 2015.
  7. I. Badran and Y.-J. Shi, Promotion of exocyclic bond cleavages in the decomposition of 1,3-disilacyclobutane in the presence of a metal filament, Journal of Physical Chemistry A 119(4): 590 - 600, 5 January 2015.
20143 publications
  1. R. Toukabri and Y.-J. Shi, Effect of pressure on the gas-phase chemistry when using MMS and DMS in hot-wire chemical vapor deposition, Canadian Journal of Chemistry 93(1): 82 - 90, 17 July 2014.
  2. R. Toukabri and Y.-J. Shi, Dominance of silylene chemistry in the decomposition of monomethylsilane in the presence of a heated metal filament, Journal of Physical Chemistry A 118(12): 3866 - 3874, 12 May 2014.
  3. R. Toukabri and Y.-J. Shi, Unraveling the complex chemistry using dimethylsilane as a precursor gas in hot wire chemical vapor deposition , Physical Chemistry Chemical Physics 16: 7896 - 7906, 4 March 2014.
20133 publications
  1. R. Toukabri and Y.-J. Shi, Effect of trimethylsilane pressure on gas-phase reaction chemistry in the hot-wire chemical vapour deposition process, Journal of Vacuum Science and Technology A 31(6): 061606, 11 October 2013.
  2. R. Toukabri, N. Al-Kadhi and Y.-J. Shi, Formation of methyl radicals from decomposition of methyl-substituted silanes over tungsten and tantalum filament surfaces, Journal of Physical Chemistry A 117(33): 7697 - 7704, 22 July 2013.
  3. Y.-J. Shi, I. Badran, A. Tkalych, W. H. Kan and V. Thangadurai, Growth of crystalline tungsten carbides using 1,1,3,3-tetramethyl-1,3- disilacyclobutane on a heated tungsten filament, Journal of Physical Chemistry C 117(7): 3389 - 3395, 29 January 2013.
20125 publications
  1. I. Badran, A. Rauk and Y.-J. Shi, Theoretical study on the ring-opening of 1,3-disilacyclobutane and H 2 elimination, Journal of Physical Chemistry A 116(48): 11806 - 11816, 6 December 2012.
  2. I. Badran, T. D. Forster, R. Roesler and Y.-J. Shi, Competition of silene/silylene chemistry with free radical chain reactions using 1-methylsilacyclobutane in the hot-wire chemical vapor deposition process, Journal of Physical Chemistry A 116(41): 10054 - 10062, 18 October 2012.
  3. A. M. Coclite, Y.-J. Shi and K. K. Gleason, Grafted crystalline poly-perfluoroacrylate structures for superhydrophobic and oleophobic functional coatings, Advanced Materials 24(33): 4534 - 4539, 28 August 2012.
  4. Z .J. Cai and Y.-J. Shi, Asymmetrically distorted structures of monosilacyclobutane and disilacyclobutane radical cations studied by ab initio and density functional theories, Canadian Journal of Chemistry 90(7): 584 - 596, 27 June 2012.
  5. A. M. Coclite, Y.-J. Shi and K. K. Gleason, Controlling the degree of crystallinity and preferred crystallographic orientation in poly-perfluorodecylacrylate thin films by initiated chemical vapor deposition, Advanced Functional Materials 22(10): 2167 - 2176, 23 May 2012.
20114 publications
  1. Y.-J. Shi, X. M. Li, R. Toukabri and L. Tong, Effect of Si-H bond on the gas-phase chemistry of trimethylsilane in the hot wire chemical vapor deposition process, Journal of Physical Chemistry A 115(37): 10290 - 10298, 11 August 2011.
  2. Z .J. Cai and Y.-J. Shi, On the geometric structure puckering potential and electronic transitions of monosilacyclobutanes and disilacyclobutanes - A theoretical study, Journal of Molecular Spectroscopy 267(1-2): 178 - 185, 27 March 2011.
  3. L. Tong and Y.-J. Shi, Gas-phase reaction chemistry of 11-dimethyl-1-silacyclobutane as a precursor gas in the hot-wire chemical vapor deposition processFormation of tetramethylsilane and trimethylsilane, Canadian Journal of Chemistry 89(1): 19 - 26, 31 January 2011.
  4. W. Al-Basheer, M. Heden, Z .J. Cai and Y.-J. Shi, Study of two-photon resonant four-wave sum mixing in xenon in the spectral region of 105-110 nm, Chemical Physics 381(1-3): 59 - 66, 22 January 2011.
20101 publication
  1. L. Tong and Y.-J. Shi, Decomposition of 11-dimethyl-1-silacyclobutane on a tungsten filament - Evidence of both ring C-C and ring Si-C bond cleavages, Journal of Mass Spectrometry 45(2): 215 - 222, 1 February 2010.
20093 publications
  1. L. Tong and Y.-J. Shi, Carburization of tungsten filaments in a hot-wire chemical vapor deposition process using 1,1,3,3-tetramethyl-1,3-disilacyclobutane, ACS Applied Materials and Interfaces 1(9): 1919 - 1926, 30 September 2009.
  2. Y. Liu, S. Consta, Y.-J. Shi, R. H. Lipson and W. A. Goddard III, Prediction of the size distributions of methanol-ethanol clusters detected in VUV laser/Time-of-flight mass spectrometry, Journal of Physical Chemistry A 113(25): 6865 - 6875, 25 June 2009.
  3. Y.-J. Shi, W. Al-Basheer and R. I. Thompson, Two-photon resonant second harmonic generation in atomic xeon, Journal of Chemical Physics 130(9): 094305 (6 pp.), 5 March 2009.
20083 publications
  1. B. D. Eustergerling, M. Heden and Y.-J. Shi, Development of a new laser induced electron impact ionization source for studying the hot-wire chemical vapor deposition chemistry of silane-ammonia mixtures, Journal of Analytical Atomic Spectrometry 23: 1590 - 1598, 16 October 2008.
  2. L. Tong, C. E. Sveen and Y.-J. Shi, Study of tungsten filament aging in hot-wire chemical vapor deposition with silacyclobutane as a source gas and the H2 etching effect, Journal of Applied Physics 103(12): 123534, 30 June 2008.
  3. Y.-J. Shi, X. Li, L. Tong, R. Toukabri and B. D. Eustergerling, Decomposition of hexamethyldisilane on a hot tungsten filament and gas-phase reactions in a hot-wire chemical vapor deposition reactor, Physical Chemistry Chemical Physics 10(18): 2543 - 2551, 17 March 2008.
20074 publications
  1. B. D. Eustergerling, M. Heden and Y.-J. Shi, Application of Laser Induced Electron Impact Ionization to the Deposition Chemistry in the Hot-Wire Chemical Vapor Deposition Process with SiH4-NH3 Gas Mixtures, Journal of the American Society for Mass Spectrometry 18(11): 1950 - 1958, 1 November 2007.
  2. Y. Liu, S. Consta, F. Ogeer, Y.-J. Shi and R. H. Lipson, Geometries and energetics of methanol-ethanol clusters: A VUV laser/time-of-flight mass spectrometry and density functional theory study, Canadian Journal of Chemistry 85(10): 843 - 852, 1 October 2007.
  3. X. M. Li, B. D. Eustergerling and Y.-J. Shi, Mass spectrometric study of gas-phase chemistry in a hot-wire chemical vapor deposition reactor with tetramethylsilane, International Journal of Mass Spectrometry 263(2-3): 233 - 242, 1 June 2007.
  4. Y.-J. Shi, B. Lo, L. Tong, X. Li, B. D. Eustergerling and T. S. Sorensen, In situ diagnostics of the decomposition of silacyclobutane on a hot filament by vacuum ultraviolet laser ionization mass spectrometry, Journal of Mass Spectrometry 42(5): 575 - 583, 6 February 2007.
20051 publication
  1. Y.-J. Shi and R. H. Lipson, An overview of organic molecule soft ionization using vacuum ultraviolet laser radiation, Canadian Journal of Chemistry 83(11): 1891 - 1902, 1 November 2005.
20042 publications
  1. S. Lam, Y.-J. Shi, N. J. Mosey, T. K. Woo and R. H. Lipson, Mechanism for the formation of gas-phase protonated alcohol-ether adducts by VUV laser ionization and density-functional calculations, Journal of Chemical Physics 121(20): 10006 - 10014, 24 November 2004.
  2. Y.-J. Shi, S. Wang, Z. J. Jakubek and B. Simard, A vacuum ultraviolet laser single-photon zero kinetic energy photoelectron spectroscopic study of the X~2E 3 /2 ground electronic state of CH3Br+, Canadian Journal of Chemistry 82(6): 1077 - 1082, 6 June 2004.
20032 publications
  1. S. Wang, Y.-J. Shi, S. Denommee, B. Simard and Y.-P. Lee, Investigation of some Rydberg states of ketene by two-photon resonance-enhanced multiphoton ionization spectroscopy, Journal of Chemical Physics 119(15): 7772 - 7784, 15 October 2003.
  2. G. S. Fanourgakis, Y.-J. Shi, S. Consta and R. H. Lipson, A spectroscopic and computer simulation study of butanol vapors, Journal of Chemical Physics 119(13): 6597 - 6608, 1 October 2003.
20023 publications
  1. S. Wang, Y.-J. Shi, Z. J. Jakubek, M. Barnett, B. Simard, K. Muller-Dethlefs, C.-P. Liu and Y.-P. Lee, Nonresonant two-photon mass analyzed threshold ionization and zero kinetic energy photoelectron investigation of the X̃ 2B1 ground state of CH2CO+ and CD2CO+, Journal of Chemical Physics 117(14): 6546 - 6555, 8 October 2002.
  2. Y.-J. Shi, S. Consta, A. K. Das, B. Mallik, D. Lacey and R. H. Lipson, A 118 nm vacuum ultraviolet laser/time-of-flight mass spectroscopic study of methanol and ethanol clusters in the vapor phase, Journal of Chemical Physics 116(16): 6990 - 6999, 22 April 2002.
  3. X. K. Hu, D. M. Mao, Y.-J. Shi, S. S. Dimov and R. H. Lipson, Two-photon accessible Xe 2 Rydberg states between its first two ionization limits, Chemical Physics Letters 353(3-4): 213 - 220, 19 February 2002.
20012 publications
  1. D. M. Mao, X. K. Hu, Y.-J. Shi and R. H. Lipson, Evidence of orbital mixing for KrXe and ArXe excited states in the vacuum ultraviolet, Physical Chemistry Chemical Physics 3: 4258 - 4261, 10 September 2001.
  2. D. M. Mao, X. K. Hu, Y.-J. Shi, J. H. Leech and R. H. Lipson, Extreme ultraviolet laser/time-of-flight mass spectra of Kr2 near Kr*(4d,5p',6s), Journal of Chemical Physics 114(9): 4025 - 4035, 1 March 2001.
20001 publication
  1. D. M. Mao, X. K. Hu, Y.-J. Shi and R. H. Lipson, Dispersive photoelectron spectroscopy of the ungerade Rydberg states of XE 2 near XE*(6p,5d), Chemical Physics 257(2-3): 253 - 261, 15 July 2000.
19991 publication
  1. R. H. Lipson, S. S. Dimov, P. Wang, Y.-J. Shi, D. M. Mao, X. K. Hu and J. Vanstone, Vacuum ultraviolet and extreme ultraviolet lasers: principles instrumentation and applications, Instrumentation Science and Technology 28(2): 85 - 118, 30 July 1999.
19981 publication
  1. X. K. Hu, D. M. Mao, Y.-J. Shi, S. S. Dimov and R. H. Lipson, Mass-resolved two-photon and photoelectron spectra of Xe 2 in the Xe(4f) region above the first molecular ionization limit, Journal of Chemical Physics 109(10): 3944 - 3953, 8 September 1998.

Conference Publications

20112 publications
  1. C. E. Sveen and Y.-J. Shi, Effect of filament temperature and deposition time on the formation of tungsten silicide with silane, Thin Solid Films, 2 May 2011 519(14): 4447 - 4450.
  2. Y.-J. Shi, L. Tong, B. D. Eustergerling and X. M. Li, Silicidation and carburization of the tungsten filament in HWCVD with silacyclobutane precursor gases, Thin Solid Films, 2 May 2011 519(14): 4442 - 4446.
20091 publication
  1. L. Tong and Y.-J. Shi, A mechanistic study of gas-phase reactions with 1133-tetramethyl-13-disilacyclobutane in the hot-wire chemical vapor deposition process, Thin Solid Films, 30 April 2009 517(12): 3461 - 3465.
20081 publication
  1. Y.-J. Shi, B. D. Eustergerling and X. M. Li, Mass spectrometric study of gas-phase chemistry in the hot-wire CVD processes of SiH4/NH3 mixtures, Thin Solid Films, 15 January 2008 516(5): 506 - 510.